Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9719859 | Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beams | Haruhiko Kusunose | 2017-08-01 |
| 9588421 | Pellicle inspection apparatus | Atsushi TAJIMA, Haruhiko Kusunose | 2017-03-07 |
| 9583908 | Pulsed iodine laser apparatus | — | 2017-02-28 |