Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9833874 | Applying dimensional reduction to spectral data from polishing substrates | Boguslaw A. Swedek, Benjamin Cherian | 2017-12-05 |
| 9811077 | Polishing with pre deposition spectrum | Tomohiko Kitajima, Jun Qian, Taketo Sekine, Garlen C. Leung, Sidney P. Huey | 2017-11-07 |
| 9649743 | Dynamically tracking spectrum features for endpoint detection | Harry Q. Lee | 2017-05-16 |
| 9583405 | Endpointing detection for chemical mechanical polishing based on spectrometry | Dominic J. Benvegnu, Boguslaw A. Swedek | 2017-02-28 |
| 9573242 | Computer program product and method of controlling polishing of a substrate | — | 2017-02-21 |
| 9551567 | Reducing noise in spectral data from polishing substrates | Boguslaw A. Swedek, Benjamin Cherian | 2017-01-24 |