Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9833874 | Applying dimensional reduction to spectral data from polishing substrates | Jeffrey Drue David, Benjamin Cherian | 2017-12-05 |
| 9799578 | Peak-based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, David J. Lischka | 2017-10-24 |
| 9754846 | Inductive monitoring of conductive trench depth | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Dominic J. Benvegnu +2 more | 2017-09-05 |
| 9636797 | Adjusting eddy current measurements | Kun Xu, Ingemar Carlsson, Doyle E. Bennett, Shih-Haur Shen, Hassan G. Iravani +2 more | 2017-05-02 |
| 9583405 | Endpointing detection for chemical mechanical polishing based on spectrometry | Dominic J. Benvegnu, Jeffrey Drue David | 2017-02-28 |
| 9564377 | Peak-based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, David J. Lischka | 2017-02-07 |
| 9551567 | Reducing noise in spectral data from polishing substrates | Jeffrey Drue David, Benjamin Cherian | 2017-01-24 |