Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9833874 | Applying dimensional reduction to spectral data from polishing substrates | Jeffrey Drue David, Boguslaw A. Swedek | 2017-12-05 |
| 9607910 | Limiting adjustment of polishing rates during substrate polishing | Dominic J. Benvegnu, Sivakumar Dhandapani, Harry Q. Lee | 2017-03-28 |
| 9551567 | Reducing noise in spectral data from polishing substrates | Jeffrey Drue David, Boguslaw A. Swedek | 2017-01-24 |