Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811077 | Polishing with pre deposition spectrum | Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Sidney P. Huey | 2017-11-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811077 | Polishing with pre deposition spectrum | Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Sidney P. Huey | 2017-11-07 |