Method for RF compensation in plasma assisted atomic layer deposition

Assignee

• Lam Research

Inventors

• Jun Qian (118 patents)
• Frank L. Pasquale (45 patents)
• Adrien LaVoie (177 patents)
• Chloe Baldasseroni (29 patents)
• Hu Kang (52 patents)
• Shankar Swaminathan (85 patents)
• Purushottam Kumar (52 patents)
• Paul Franzen (8 patents)
• Trung T. Le (2 patents)
• Tuan Nguyen (180 patents)
• Jennifer Leigh Petraglia (15 patents)
• David Charles Smith (52 patents)
• Seshasayee Varadarajan (45 patents)

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