Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824884 | Method for depositing metals free ald silicon nitride films using halide-based precursors | James S. Sims, Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Seshasayee Varadarajan | 2017-11-21 |
| 9611987 | White light source employing a III-nitride based laser diode pumping a phosphor | James S. Speck, Nathan A. Pfaff, Steven P. DenBaars | 2017-04-04 |