Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824884 | Method for depositing metals free ald silicon nitride films using halide-based precursors | James S. Sims, Jon Henri, Ramesh Chandrasekharan, Andrew John McKerrow, Kathryn M. Kelchner | 2017-11-21 |
| 9624578 | Method for RF compensation in plasma assisted atomic layer deposition | Jun Qian, Frank L. Pasquale, Adrien LaVoie, Chloe Baldasseroni, Hu Kang +7 more | 2017-04-18 |
| 9601693 | Method for encapsulating a chalcogenide material | Jon Henri, Dennis M. Hausmann, Bhadri N. Varadarajan | 2017-03-21 |