Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837270 | Densification of silicon carbide film using remote plasma treatment | Bo Gong, Guangbi Yuan, Zhe Gui, Fengyuan Lai | 2017-12-05 |
| 9828672 | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma | Bo Gong, Rachel E. Batzer, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn | 2017-11-28 |
| 9778561 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie +3 more | 2017-10-03 |
| 9659769 | Tensile dielectric films using UV curing | Sean Chang, James S. Sims, Guangquan Lu, David Mordo, Kevin J. Ilcisin +2 more | 2017-05-23 |
| 9601693 | Method for encapsulating a chalcogenide material | Jon Henri, Dennis M. Hausmann, Seshasayee Varadarajan | 2017-03-21 |