Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837270 | Densification of silicon carbide film using remote plasma treatment | Bhadri N. Varadarajan, Guangbi Yuan, Zhe Gui, Fengyuan Lai | 2017-12-05 |
| 9828672 | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma | Bhadri N. Varadarajan, Rachel E. Batzer, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn | 2017-11-28 |