RB

Rachel E. Batzer

Lam Research: 1 patents #161 of 396Top 45%
Overall (2017): #275,076 of 506,227Top 55%
1
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9828672 Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma Bhadri N. Varadarajan, Bo Gong, Huatan Qiu, Bart J. van Schravendijk, Geoffrey Hohn 2017-11-28