Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778561 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2017-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9778561 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, Richard A. Gottscho, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2017-10-03 |