Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824941 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Yaswanth Rangineni, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2017-11-21 |
| 9738977 | Showerhead curtain gas method and system for film profile modulation | Adrien LaVoie | 2017-08-22 |
| 9644271 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2017-05-09 |