Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840776 | Multi-station plasma reactor with RF balancing | Sunil Kapoor, Karl Leeser, Adrien LaVoie | 2017-12-12 |
| 9824941 | Systems and methods for detection of plasma instability by electrical measurement | Yukinori Sakiyama, Ishtak Karim, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2017-11-21 |
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Jeremy Tucker, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2017-09-05 |
| 9644271 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Adrien LaVoie, Yukinori Sakiyama, Edward Augustyniak +2 more | 2017-05-09 |