Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840776 | Multi-station plasma reactor with RF balancing | Karl Leeser, Adrien LaVoie, Yaswanth Rangineni | 2017-12-12 |
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Jeremy Tucker, Douglas Keil, Edward Augustyniak | 2017-09-05 |