Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2017-09-05 |