Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793108 | Interconnect integration for sidewall pore seal and via cleanliness | Mehul Naik, Deenesh Padhi, Priyanka DASH, Bhaskar Kumar, Alexandros T. Demos | 2017-10-17 |
| 9761489 | Self-aligned interconnects formed using substractive techniques | Bencherki Mebarki, Huixiong Dai, Yongmei Chen, Mehul Naik | 2017-09-12 |
| 9646876 | Aluminum nitride barrier layer | Deenesh Padhi, Srinivas Guggilla, Alexandros T. Demos, Bhaskar Kumar, Priyanka DASH | 2017-05-09 |
| 9640424 | Integrated metal spacer and air gap interconnect | Mehul Naik | 2017-05-02 |
| 9601431 | Dielectric/metal barrier integration to prevent copper diffusion | Mehul Naik, Yong Cao, Mei-Yee Shek, Yana Cheng, Sree Rangasai V. Kesapragada | 2017-03-21 |
| 9576810 | Process for etching metal using a combination of plasma and solid state sources | Subhash Deshmukh, Joseph R. Johnson, Jingjing Liu | 2017-02-21 |