Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721802 | LED based optical source coupled with plasma source | Joseph R. Johnson | 2017-08-01 |
| 9576810 | Process for etching metal using a combination of plasma and solid state sources | Joseph R. Johnson, Jingjing Liu, He Ren | 2017-02-21 |