Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9754824 | Tungsten films having low fluorine content | Lawrence Schloss | 2017-09-05 |
| 9633861 | Cu/barrier interface enhancement | Weifeng YE, Mei-Yee Shek, Mihaela Balseanu, Xiaojun Zhang, Yu Jin +1 more | 2017-04-25 |
| 9613818 | Deposition of low fluorine tungsten by sequential CVD process | Raashina Humayun, Michal Danek, Lawrence Schloss | 2017-04-04 |
| 9580801 | Enhancing electrical property and UV compatibility of ultrathin blok barrier film | Weifeng YE, Mei-Yee Shek, Yu Jin, Li-Qun Xia, Deenesh Padhi +1 more | 2017-02-28 |