Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748137 | Method for void-free cobalt gap fill | Chiukin Steven Lai, Jeong-Seok Na, Raihan M. Tarafdar, Raashina Humayun | 2017-08-29 |
| 9673146 | Low temperature tungsten film deposition for small critical dimension contacts and interconnects | Feng Chen, Raashina Humayun, Anand Chandrashekar | 2017-06-06 |
| 9653353 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Juwen Gao, Deqi Wang | 2017-05-16 |
| 9613818 | Deposition of low fluorine tungsten by sequential CVD process | Xiaolan Ba, Raashina Humayun, Lawrence Schloss | 2017-04-04 |
| 9595470 | Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursor | Hanna Bamnolker, Raashina Humayun, Juwen Gao, Joshua Collins | 2017-03-14 |