Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673146 | Low temperature tungsten film deposition for small critical dimension contacts and interconnects | Feng Chen, Raashina Humayun, Michal Danek | 2017-06-06 |
| 9653353 | Tungsten feature fill | Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao, Deqi Wang | 2017-05-16 |
| 9589835 | Method for forming tungsten film having low resistivity, low roughness and high reflectivity | Raashina Humayun | 2017-03-07 |
| 9548228 | Void free tungsten fill in different sized features | Raashina Humayun | 2017-01-17 |