Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9799511 | Methods for depositing low k and low wet etch rate dielectric thin films | Ning Li, Mark Saly, David Thompson, Mihaela Balseanu | 2017-10-24 |
| 9748125 | Continuous substrate processing system | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Ralf Hofmann, Pravin K. Narwankar +2 more | 2017-08-29 |
| 9646642 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Yong Won Lee, Matthew D. Scotney-Castle +2 more | 2017-05-09 |
| 9633861 | Cu/barrier interface enhancement | Weifeng YE, Mei-Yee Shek, Mihaela Balseanu, Xiaojun Zhang, Xiaolan Ba +1 more | 2017-04-25 |
| 9580801 | Enhancing electrical property and UV compatibility of ultrathin blok barrier film | Xiaolan Ba, Weifeng YE, Mei-Yee Shek, Yu Jin, Deenesh Padhi +1 more | 2017-02-28 |