Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9812318 | Low temperature molecular layer deposition of SiCON | David Thompson, Lakmal C. Kalutarage | 2017-11-07 | $31,945,000 |
| 9802828 | Precursors suitable for high temperature atomic layer deposition of silicon-containing films | — | 2017-10-31 | $27,276,000 |
| 9799511 | Methods for depositing low k and low wet etch rate dielectric thin films | Ning Li, David Thompson, Mihaela Balseanu, Li-Qun Xia | 2017-10-24 | $27,129,000 |
| 9685325 | Carbon and/or nitrogen incorporation in silicon based films using silicon precursors with organic co-reactants by PE-ALD | David Thompson, Jessica S. Kachian | 2017-06-20 | $22,588,000 |