Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805965 | Pixelated capacitance controlled ESC | Wendell Glen Boyd, Jr., Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-10-31 |
| 9646843 | Tunable magnetic field to improve uniformity | Andrew Nguyen, Tza-Jing Gung, Haitao Wang, Maxim Mikhailovich Noginov, Chunlei Zhang +1 more | 2017-05-09 |
| 9536769 | Pixelated capacitance controlled ESC | Wendell Glen Boyd, Jr., Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-01-03 |