Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9668373 | Substrate support chuck cooling for deposition chamber | Brian T. West, Vijay D. Parkhe, Robert T. Hirahara | 2017-05-30 |
DD
Dan DEYO
Overall (2017): #451,396 of 506,227Top 90%
1
Patents 2017