Issued Patents 2005
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Chie Shishido, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6952492 | Method and apparatus for inspecting a semiconductor device | Maki Tanaka, Kenji Watanabe, Mari Nozoe, Hiroshi Miyai | 2005-10-04 |
| 6947594 | Image processing method and systems | Koichi Fujimura | 2005-09-20 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2005-07-19 |
| 6912779 | Method of manufacturing flexible wiring board | Keiichi Naitoh, Toshihiro Shinohara | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Yasuhiro Yoshitake, Shunichi Matsumoto, Takashi Iizumi +3 more | 2005-06-21 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Shunji Maeda, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe | 2005-05-31 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Chie Shishido, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Takashi Hiroi, Hiroyuki Shinada, Taku Ninomiya | 2005-04-26 |
| 6879392 | Method and apparatus for inspecting defects | Kaoru Sakai, Shunji Maeda, Takafumi Okabe | 2005-04-12 |
| 6877365 | Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope | Toshihiko Nakata | 2005-04-12 |
| 6869807 | Method and its apparatus for manufacturing semiconductor device | Yasuhiro Yoshitake, Kenji Tamaki | 2005-03-22 |
| 6865288 | Pattern inspection method and apparatus | Chie Shishido, Yuji Takagi, Hiroshi Miyai | 2005-03-08 |