Issued Patents 2005
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979823 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Atsuko Takafuji +4 more | 2005-12-27 |
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka +2 more | 2005-12-13 |
| 6952492 | Method and apparatus for inspecting a semiconductor device | Maki Tanaka, Masahiro Watanabe, Kenji Watanabe, Hiroshi Miyai | 2005-10-04 |
| 6952105 | Inspection method and apparatus for circuit pattern of resist material | Zhaohui Cheng | 2005-10-04 |
| 6931620 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Hiroyuki Shinada | 2005-08-16 |
| 6924482 | Method of inspecting pattern and inspecting instrument | Mitsuo Suga, Yoichiro Neo, Hidetoshi Nishiyama | 2005-08-02 |
| 6919564 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2005-07-19 |
| 6903821 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi +2 more | 2005-06-07 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka +2 more | 2005-05-24 |
| 6859060 | Inspection method of semiconductor device and inspection system | Yoichiro Neo | 2005-02-22 |
| 6853204 | Wafer inspection method of charging wafer with a charged particle beam then measuring electric properties thereof, and inspection device based thereon | Hidetoshi Nishiyama | 2005-02-08 |
| 6838667 | Method and apparatus for charged particle beam microscopy | Ruriko Tsuneta, Masanari Koguchi, Muneyuki Fukuda, Mitsugu Sato | 2005-01-04 |