Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979823 | Patterned wafer inspection method and apparatus therefor | Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe, Atsuko Takafuji +4 more | 2005-12-27 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6931620 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2005-08-16 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Yasutsugu Usami | 2005-07-19 |
| 6888138 | Absorption current image apparatus in electron microscope | Takashi Ohshima, Hiroshi Makino, Hiroshi Toyama | 2005-05-03 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2005-04-26 |