Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979823 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2005-12-27 |
| 6919564 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi +2 more | 2005-07-19 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada | 2005-07-19 |
| 6903821 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi +2 more | 2005-06-07 |
| 6894790 | Micropattern shape measuring system and method | Yasuhiro Mitsui, Isao Kawata, Yuya Toyoshima, Tadashi Otaka, Nobuyuki Iriki | 2005-05-17 |