Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975754 | Circuit pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6919564 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2005-07-19 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2005-07-19 |
| 6903821 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +2 more | 2005-06-07 |
| 6898305 | Circuit pattern inspection method and apparatus | Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2005-04-26 |