Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6947587 | Defect inspection method and apparatus | Shunji Maeda, Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Yuji Takagi +2 more | 2005-09-20 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6929892 | Method of monitoring an exposure process | Hidetoshi Morokuma, Yuki Ojima, Maki Tanaka, Wataru Nagatomo | 2005-08-16 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Osamu Komuro, Hidetoshi Morokuma, Ryo Nakagaki, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto, Takashi Iizumi +3 more | 2005-06-21 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |
| 6865288 | Pattern inspection method and apparatus | Masahiro Watanabe, Yuji Takagi, Hiroshi Miyai | 2005-03-08 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi | 2005-01-11 |