Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2005-08-30 |
| 6897956 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Toshihiko Nakata, Shunji Maeda | 2005-05-24 |
| 6894302 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2005-05-17 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Yoshimasa Ohshima, Yukio Kembo, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2005-05-03 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2005-01-11 |