Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2005-08-30 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yukio Kembo, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2005-05-03 |