Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2005-08-30 |
| 6931620 | Inspection method and inspection system using charged particle beam | Mari Nozoe, Hiroyuki Shinada | 2005-08-16 |
| 6924482 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Mitsuo Suga, Yoichiro Neo | 2005-08-02 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yukio Kembo, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Kenji Oka, Takanori Ninomiya +4 more | 2005-05-03 |
| 6853204 | Wafer inspection method of charging wafer with a charged particle beam then measuring electric properties thereof, and inspection device based thereon | Mari Nozoe | 2005-02-08 |