Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6850320 | Method for inspecting defects and an apparatus for the same | Yukihiro Shibata, Shunji Maeda | 2005-02-01 |