Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947587 | Defect inspection method and apparatus | Kenji Oka, Yukihiro Shibata, Minoru Yoshida, Chie Shishido, Yuji Takagi +2 more | 2005-09-20 |
| 6943876 | Method and apparatus for detecting pattern defects | Minoru Yoshida, Sachio Uto, Toshihiko Nakata | 2005-09-13 |
| 6927847 | Method and apparatus for inspecting pattern defects | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe | 2005-08-09 |
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2005-07-26 |
| 6900888 | Method and apparatus for inspecting a pattern formed on a substrate | Minoru Yoshida, Atsushi Shimoda, Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2005-05-31 |
| 6897956 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Minori Noguchi, Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Toshihiko Nakata | 2005-05-24 |
| 6879392 | Method and apparatus for inspecting defects | Kaoru Sakai, Takafumi Okabe, Masahiro Watanabe | 2005-04-12 |
| 6850320 | Method for inspecting defects and an apparatus for the same | Yukihiro Shibata, Yukio Kembo | 2005-02-01 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2005-01-11 |