Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943086 | Laser annealing apparatus, TFT device and annealing method of the same | Mikio Hongo, Sachio Uto, Mineo Nomoto, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2005-09-13 |
| 6943876 | Method and apparatus for detecting pattern defects | Minoru Yoshida, Sachio Uto, Shunji Maeda | 2005-09-13 |
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2005-07-26 |
| 6897956 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Minori Noguchi, Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Shunji Maeda | 2005-05-24 |
| 6877365 | Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope | Masahiro Watanabe | 2005-04-12 |