Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943086 | Laser annealing apparatus, TFT device and annealing method of the same | Mikio Hongo, Mineo Nomoto, Toshihiko Nakata, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2005-09-13 |
| 6943876 | Method and apparatus for detecting pattern defects | Minoru Yoshida, Shunji Maeda, Toshihiko Nakata | 2005-09-13 |
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida | 2005-07-26 |