Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6921905 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2005-07-26 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Shunichi Matsumoto, Takashi Iizumi +3 more | 2005-06-21 |
| 6869807 | Method and its apparatus for manufacturing semiconductor device | Kenji Tamaki, Masahiro Watanabe | 2005-03-22 |
| 6841321 | Method and system for processing a semi-conductor device | Shunichi Matsumoto, Yoshiyuki Miyamoto | 2005-01-11 |