Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916396 | Etching system and etching method | Akira Kagoshima, Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka +1 more | 2005-07-12 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2005-04-19 |
| 6879241 | Vehicle ready for card key and radio communication system which utilizes card key | Tomokazu Sakamoto, Yoshiyuki Horii, Satoshi Kazama, Hidetoshi Kabayama, Dai Higashida | 2005-04-12 |
| 6869807 | Method and its apparatus for manufacturing semiconductor device | Yasuhiro Yoshitake, Masahiro Watanabe | 2005-03-22 |