Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939435 | Plasma processing apparatus and processing method | Junichi Tanaka, Hideyuki Yamamoto, Shoji Ikuhara, Akira Kagoshima | 2005-09-06 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Junichi Tanaka +2 more | 2005-04-19 |
| 6879867 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Junichi Tanaka, Hideyuki Yamamoto, Shoji Ikuhara, Kazue Takahashi | 2005-04-12 |