Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939435 | Plasma processing apparatus and processing method | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara | 2005-09-06 |
| 6916396 | Etching system and etching method | Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka, Kenji Tamaki +1 more | 2005-07-12 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Shoji Ikuhara, Daisuke Shiraishi, Junichi Tanaka | 2005-06-21 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai, Junichi Tanaka +2 more | 2005-04-19 |