Issued Patents 2005
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974909 | IC module, and wireless information-storage medium and wireless information-transmitting/receiving apparatus including the IC module | Hiroyuki Takubo, Shigenobu Abe | 2005-12-13 |
| 6966346 | Gas supply apparatus and gas supply method | Takashi Orita, Makoto Echigojima | 2005-11-22 |
| 6963028 | IC module, and wireless information-storage medium and wireless information-transmitting/receiving apparatus including the IC wireless | Hiroyuki Takubo, Shigenobu Abe | 2005-11-08 |
| 6939435 | Plasma processing apparatus and processing method | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Akira Kagoshima | 2005-09-06 |
| 6916396 | Etching system and etching method | Akira Kagoshima, Motohiko Yoshigai, Hideyuki Yamamoto, Daisuke Shiraishi, Kenji Tamaki +1 more | 2005-07-12 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Akira Kagoshima, Shoji Ikuhara, Daisuke Shiraishi | 2005-06-21 |
| 6902683 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Shinichi Tachi, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani | 2005-06-07 |
| 6899766 | Diagnosis method for semiconductor processing apparatus | Go Miya, Tsutomu Tetsuka, Hideyuki Yamamoto | 2005-05-31 |
| 6881352 | Disturbance-free, recipe-controlled plasma processing method | Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara, Toshio Masuda, Hiroyuki Kitsunai +2 more | 2005-04-19 |
| 6879867 | Process monitoring device for sample processing apparatus and control method of sample processing apparatus | Hiroyuki Kitsunai, Hideyuki Yamamoto, Shoji Ikuhara, Kazue Takahashi | 2005-04-12 |
| 6866744 | Semiconductor processing apparatus and a diagnosis method therefor | Go Miya, Tsutomu Tetsuka, Hideyuki Yamamoto | 2005-03-15 |
| 6841032 | Plasma processing apparatus for adjusting plasma processing through detecting plasma processing state within chamber | Shoji Ikuhara, Hideyuki Yamamoto | 2005-01-11 |