Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979168 | Method and apparatus for transferring substrate | Yoichi Uchimaki, Yuko Egawa | 2005-12-27 |
| 6961131 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Tatehito Usui, Takashi Fujii, Motohiko Yoshigai | 2005-11-01 |
| 6902683 | Plasma processing apparatus and plasma processing method | Shinichi Tachi, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2005-06-07 |
| 6903826 | Method and apparatus for determining endpoint of semiconductor element fabricating process | Tatehito Usui, Takashi Fujii, Motohiko Yoshigai, Hideyuki Yamamoto | 2005-06-07 |
| 6890771 | Plasma processing method using spectroscopic processing unit | Shizuaki Kimura, Tatehito Usui, Takashi Fujii | 2005-05-10 |