Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927173 | Plasma processing method | Masahito Mori, Kenetsu Yokogawa | 2005-08-09 |
| 6902683 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2005-06-07 |
| 6842658 | Method of manufacturing a semiconductor device and manufacturing system | Masaru Izawa, Masahito Mori, Nobuyuki Negishi | 2005-01-11 |