Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972848 | Semiconductor fabricating apparatus with function of determining etching processing state | Motohiko Yoshigai, Kazuhiro Jyouo, Tetsuo Ono | 2005-12-06 |
| 6967109 | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units | Tetsuo Ono, Ryoji Nishio, Kazue Takahashi, Nobuyuki Mise | 2005-11-22 |
| 6961131 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Takashi Fujii, Motohiko Yoshigai, Tetsunori Kaji | 2005-11-01 |
| 6923885 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Mitsuru Suehiro, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2005-08-02 |
| 6903826 | Method and apparatus for determining endpoint of semiconductor element fabricating process | Takashi Fujii, Motohiko Yoshigai, Tetsunori Kaji, Hideyuki Yamamoto | 2005-06-07 |
| 6890771 | Plasma processing method using spectroscopic processing unit | Tetsunori Kaji, Shizuaki Kimura, Takashi Fujii | 2005-05-10 |