Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6923885 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2005-08-02 |
| 6914005 | Plasma etching method | Muneo Furuse, Hiroshi Kanekiyo, Kunihiko Koroyasu, Tomoyuki Tamura | 2005-07-05 |