Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914005 | Plasma etching method | Mitsuru Suehiro, Hiroshi Kanekiyo, Kunihiko Koroyasu, Tomoyuki Tamura | 2005-07-05 |
| 6875477 | Method for coating internal surface of plasma processing chamber | Douglas M. Trickett | 2005-04-05 |
| 6837937 | Plasma processing apparatus | Susumu Tauchi, Masanori Kadotani, Motohiko Yoshigai | 2005-01-04 |