Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897403 | Plasma processing method and plasma processing apparatus | Ryujiro Udo, Masatsugu Arai, Motohiko Yoshigai | 2005-05-24 |
| 6837937 | Plasma processing apparatus | Susumu Tauchi, Muneo Furuse, Motohiko Yoshigai | 2005-01-04 |
| 6838833 | Plasma processing apparatus | Masatsugu Arai, Ryujiro Udo, Naoyuki Tamura, Motohiko Yoshigai | 2005-01-04 |