Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897403 | Plasma processing method and plasma processing apparatus | Masatsugu Arai, Motohiko Yoshigai, Masanori Kadotani | 2005-05-24 |
| 6838833 | Plasma processing apparatus | Masatsugu Arai, Naoyuki Tamura, Masanori Kadotani, Motohiko Yoshigai | 2005-01-04 |